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Murata MEMS Sensors

Murata MEMS Sensors product range includes accelerometers, gyroscopes, and inclinometers. Using Murata's 3D MEMS technology, the silicon capacitive sensors are very sensitive to inertial forces, but are insensitive to other environmental variables. The composition of single crystal silicon and glass ensures reliability, accuracy, and stability. Murata MEMS are hermetically sealed in a wafer level process, providing protection from particles and chemicals. The product line includes accelerometers, gyroscopes, and inclinometers.

Murata accelerometers, designed to measure direction that is parallel or perpendicular to the mounting plane, include an on-chip EEPROM memory with the calibration coefficients for unit interchangeability. These sensors, intended for horizontal or vertical measurements, offer enhanced failure detection as well as zero point temperature dependence of less than 1mg/ºC.

Murata combination sensors include both a one-axis gyro and a three-axis accelerometer. These combination sensors are suitable for use in automotive and other high precision applications where the environmental conditions are harsh, including temperature changes and high vibration.

Murata inclinometers offer the best shock durability and highest accuracy on the MEMS market, even in very high vibration environments. Murata inclinometers are targeted for high-accuracy leveling and inclination measurements in moving machines, vehicles, airplanes, construction machines, and hand held devices.
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