Murata MEMS Sensors product range includes accelerometers, gyroscopes, and inclinometers. Using Murata's 3D MEMS technology, the silicon capacitive sensors are very sensitive to inertial forces, but are insensitive to other environmental variables. The composition of single crystal silicon and glass ensures reliability, accuracy, and stability. Murata MEMS are hermetically sealed in a wafer level process, providing protection from particles and chemicals. The product line includes accelerometers, gyroscopes, and inclinometers.