STMicroelectronics LPS331 MEMS Pressure Sensor
STMicroelectronics' LPS331 MEMS Pressure Sensor is an ultra compact absolute piezoresistive pressure sensor. It includes a monolithic sensing element and an IC interface able to take the information from the sensing element and to provide a digital signal to the external world. The sensing element consists of a suspended membrane realized inside a single mono-silicon substrate. It is capable to detecting pressure and is manufactured using a dedicated process developed by ST, called VENSENS. The VENSENS process allows them to build a monosilicon membrane above an air cavity with controlled gap and defined pressure. The membrane is very small compared to the traditionally built silicon micromachined membranes. Membrane breakage is prevented by an intrinsic mechanical stopper. The IC interface is manufactured using a standard CMOS process that allows a high level of integration to design a dedicated circuit which is trimmed to better match the sensing element characteristics.