D6F MEMS Flow Sensors

The Omron family of D6F MEMS (MicroElectroMechanical System) Flow Sensors includes intelligent, compact models capable of measuring flow velocity and mass flow rate movement with highly repeatable accuracy. Mass flow rates from 1 LPM to 50 LPM (liters per minute) and high sensitivity are achieved with the MEMS Flow Chip.

Features Small size due to MEMS technology Flow Sensors can be used with most medical, inert welding, and combustion gases Excellent repeatability and accuracy

Additional Resources MEMS Flow Sensor Newsletter MEMS Sensor Product Technology Module - PTM Technical Information and Precautions

The D6F-P, D6F-V, and D6F-W Sensors incorporate a Dust Segregation System (DSS) allowing them to be used to monitor the performance of fans, detect clogged filters in computers and projectors, and VAV control in commercial HVAC systems.

Flow Sensors Butterfly Challenge

Gas Mass Flow Sensors

Features High Accuracy Mass Flow Sensing with Omron's Propietary MEMS technology Applications include: medical respiratory equipment, laboratory apparatus, combustion control, HVAC air volume control, fuel cells, gas testing equipment Media: most non-corrosive gases, including Natural Gas, Oxygen, Air, Nitrogen, N2O, Heli-Ox, Helium, CO2, Argonne Note, "Gas Media" shown on datasheets indicate what the standard parts are calibrated for. Calibrations are available in other gases. (Only Aluminum Alloy body type is suitable for natural gas.)

Type	Additional Features	Part Number	Gas	Flow Range*
NEW! Quick fastners for installation savings Associated Product: D6F-CABLE1 Cable Connector Assembly	Can measure micro-flow rate of city gas and LPG width 84.6mm x length 30mm x height 30mm RoHS Compliant	D6F-02L7-000	Natural Gas	0-2L/min
		D6F-05N7-000	Natural Gas	0-5L/min
High Accuracy Mass Flow Sensing	Small size Fast response Applicable to air, non-corrosive gas RoHS Compliant Applications include: medical respiratory equipment, analysis apparatus, pick and place systems, spectroscopy, leak detection, environmental comfort controls and mass flow controllers.	D6F-01A1-110	Air	0-1L/min
		D6F-02A1-110	Air	0-2L/min
High Accuracy Mass Flow Sensing for Natural Gas and Propane Applications	Small size Fast response Applicable to air, non-corrosive gas, natural gas and propane Applications include: analysis apparatus, combustion control RoHS Compliant	D6F-01N2-000	Natural Gas	0-1L/min
		D6F-02L2-000	Propane Gas	0-2L/min
		D6F-05N2-000	Natural Gas	0-5L/min
Compact sensors featuring MEMS technology for precision mass airflow measurement Associated Product: D6F-CABLE2 Cable Connector Assembly AWG28	Precision unidirectional mass airflow up to 3 LPM Fast Response (< 5 msec, typical) Ultra-compact size 36.6(L) x 8(W) x 16.8(H) mm Low power consumption RoHS Compliant Applications include: pick and place systems, industrial processes, leak detection, spectroscopy, mass flow controllers, scientific/test equipment, environmental comfort controls, fuel cell controls	D6F-03A3-000	Air	0-3L/min
Compact, intelligent sensor featuring MEMS technology for precision mass airflow measurement Associated Product: D6F-CABLE1 Cable Connector Assembly	Precision mass airflow up to 50 LPM Stable output across full scale Manifold mounting feature with NBR 'O' ring option Compact size 78 (L) x 30 (W) x 30 (H) mm Low power consumption RoHS Compliant Applications include: industrial processes, medical respirators and ventilators, MiG and TiG welding systems, anesthesia delivery, mass flow controllers, scientific/test equipment, fuel cell controls	D6F-20A5-000 Right-angle manifold mount connection	Air	0-20L/min
		D6F-50A5-000 Right-angle manifold mount connection	Air	0-50L/min
		D6F-10A6-000 Straight RC 1/4" BSPT threaded pipe	Air	0-10L/min
		D6F-20A6-000 Straight RC 1/4" BSPT threaded pipe	Air	0-20L/min
		D6F-50A6-000 Straight RC 1/4" BSPT threaded pipe	Air	0-50L/min
	*Mass flow converted to volumetric flow (standard liters per minute) at 0ºC and 1 atm.

Mass Flow Sensors with DSS (Dust Segregation System)

Type	Features	Part Number	Gas*	Airflow
Compact, high-performance flow sensor with Dust Segregation Structure	PCB terminals and connector models New manifold mount version eliminates tube fittings 0.1 - 1.0 LPM in-line, over 200 LPM possible when using a bypass set-up Bi-directional Dust Segregation System keeps particulate away from the sensor element Standard products are calibrated for unidirectional air flow Alternative to differential pressure sensing RoHS Compliance	D6F-P0001A1 PCB terminals, flange mount	Air	0-0.1 LPM
		D6F-P0010A2, PCB terminals, flange mount	Air	0-1 LPM
		D6F-P0010A1** Connector, flange mount	Air	0-1 LPM
		D6F-P0010AM2** Connector, manifold mount	Air	0-1 LPM
	*Dry gas must not contain large particles, e.g. dust, oil, mist **Associated Product: Cable Connector Assembly AWG28, D6F-CABLE2

D6F-P DSS Simulation



D6F-P MEMS Flow Sensors Applications

Gas Velocity / Clogged Filter Sensors

Features Excellent for clogged filter detection and fan performance monitoring Take air velocity readings behind filters, in pipes or ductwork Proprietary MEMS technology Dust Segregation System keeps particulate away from sensor chip

Type	Additional Features	Part Number	Gas*	Flow Range
Compact, highly efficient flow sensor, unique dust separating structure Associated Product: D6F-W CABLE Cable Connector Assembly AWG26 (length 200mm)	Unique dust segregation structure. +/-10% Full-Scale repeatable accuracy achieves consistent air velocity measurement, in a cost efficient package. Applications include clogged-filter detection and air velocity. RoHS Compliant Applications: cassette, multi-modular air conditioners, duct connected heating/air systems, alternative for thermal dispersion measurement, air/water cooled chillers, indoor packaged AC systems, window/split, multi-split residential AC coolers, air purifiers, dehumidifiers, fan assisted space heaters, air cooled, high power indoor lighting, mission critical PC, workstation ventilation, watchdog ventilation systems	D6F-V03A1	Air	0-3 m/sec
MEMS precision technology for repeatable airflow velocity detection Associated Product: D6F-W CABLE AWG26 (length 200mm)	Precision uni-directional air velocity detection with ±5% full-scale repeatable accuracy. Integral passive Dust Segregation System (DSS) prevents contamination of sensor element. Compact size: 39 (L) x 20 (W) x 9 (H) mm Output signal amplified & temperature compensated. User friendly - no adjustment necessary. RoHS Compliant	D6F-W01A1	air	0-1 m/sec
		D6F-W04A1	air	0-4 m/sec
		D6F-W10A1	air	0-10 m/sec
	*Dry gas must not contain large particles, e.g. dust, oil, mist
D6F-W DSS Simulation