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Home » NEWEST Products » New by Manufacturer » Murata » Murata MEMS Sensors
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Murata MEMS Sensors

Murata MEMS Sensors

Murata MEMS sensors are robust structures that are very sensitive to inertial forces and pressure but are insensitive to other environmental variables and causes of failure. Murata's silicon capacitive sensors are made of single crystal silicon and glass. These materials ensure exceptional reliability, unprecedented accuracy and excellent stability over time and temperature. MEMS are inherently hermetically sealed in a wafer level process for reduced packaging requirements. No particles or chemicals can enter the capped sensor, a fact that ensures reliability. Depending on the needs of the application the accelerometer, gyroscope and pressure sensor elements can be designed for a specific sensitivity, measuring range and frequency response. Gyroscopes can be used for signals as small as earth's rotation and as large as tracking the motion of a human hand.


Murata Accelerometers

Murata accelerometers are based on the company's proprietary 3D MEMS technology and they offer a number of excellent product features and benefits for the most demanding applications. The measuring direction is parallel or perpendicular to the mounting plane. The ASIC includes an on-chip EEPROM memory with the calibration coefficients for unit interchangeability. Murata accelerometers include enhanced failure detection: digitally activated self-test, calibration memory parity or check sum check and continuous connection failure detection. The products are intended for horizontal or vertical measurements.The zero point temperature dependence is less than 1mg/°C.


Features
  • Excellent accuracy
  • High stability
  • Extremely stable output over wide range of
    temperature, humidity, and vibrations
  • Outstanding overload and shock durability

Applications
  • Acceleration measurement
  • Inclination measurement
  • Motion measurement
  • Vibration measurement

Part Number Data Sheet Sensing Axis Acceleration Max Supply Voltage Min Supply Voltage Output Type Digital Output - Bus Interface
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Murata Inclinometers

Murata inclination sensors are an optimum choice for high accuracy leveling and inclination measurement instruments. The highest accuracy is available with the SCA103T series which uses a differential measurement principle to compensate for all common mode error and noise effects. With the best shock durability available on the MEMS market, Murata inclinometers provide trouble-free measurements in moving machines, vehicles, airplanes, construction machines and handheld devices.

Features
  • High performance
  • Robust design with high shock durability
  • Excellent stability over temperature and time
  • Excellent accuracy
Applications
  • Platform leveling and stabilization
  • 360º vertical orientation measurement
  • Leveling instruments
  • Construction levels

Part Number Series Data Sheet Sensitivity Output Type
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Murata Gyroscopes

Murata Electronics Oy develops and manufactures gyroscope components based on the company’s proven 3D MEMS technology and highly integrated electronics. Industrial gyros offer a performance level that typically has been available only for expensive module products. The sensing elements and measuring circuitry are assembled into a pre-molded plastic dual-in-line (DIL) package, protected with silicon gel and covered with a stainless steel lid. All products are RoHS compatible and suitable for lead-free reflow soldering.

Features
  • Fully digital with SPI interface
  • Superior angular rate bias stability over
    temperature and time
  • Vibration robustness
  • Excellent noise performance
Applications
  • Avionics, Automotive, Instruments
  • Platform stabilization
  • Motion analysis
  • Navigation systems

Part Number Data Sheet Sensing Axis Max Supply Voltage Min Supply Voltage Output Type Supply Current Digital Output - Number of Bits
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Murata Development Tools

SCA8X0/21X0/3100 Demo Kit
The SCA8X0/21X0/3100 demo kit demonstrates the SCA8X0/21X0/3100 series accelerometer functionality and its key properties. The demo kit is operated through the Graphical User Interface (GUI) software. The GUI software controls the hardware with serial virtual com port driver.

This demo kit offers users an easy way to:
  • View SCA8X0/21X0/3100 output data in different formats [g], [°]
  • Access all the SCA8X0/21X0/3100 internal registers
  • Log the SCA8X0/21X0/3100 output data.

SCC1300 Demo Kit
The SCC1300 demo kit demonstrates the SCC1300 series gyroscopes functionality and its key properties. The demo kit is operated through the Graphical User Interface (GUI) software. The GUI software controls the hardware with serial virtual com port driver. The hardware consists of the USB interface board which supports SCC1300-D0X series digital output accelerometers. The USB interface board supports SCC1300-D0X PWBs. The demo kit hardware is powered from a PCs USB port.

This demo kit offers users an easy way to:
  • View SCC1300 anglular rate output data in [°/s]
  • Access all the SCC1300 internal registers
  • Log the SCC1300 output data

  • Murata Electronics
  • Sensors