|    Change Country Change Location USD
United States United States

Please confirm your currency selection:

US Dollars
Home » NEWEST Products » New by Manufacturer » Murata » MEMS Sensors -Murata
NEWEST Products
Murata MEMS Sensors

Murata MEMS Sensors

Murata MEMS sensors are robust structures that are very sensitive to inertial forces and pressure but are insensitive to other environmental variables and causes of failure. Murata's silicon capacitive sensors are made of single crystal silicon and glass. These materials ensure exceptional reliability, unprecedented accuracy and excellent stability over time and temperature. MEMS are inherently hermetically sealed in a wafer level process for reduced packaging requirements. No particles or chemicals can enter the capped sensor, a fact that ensures reliability. Depending on the needs of the application the accelerometer, gyroscope and pressure sensor elements can be designed for a specific sensitivity, measuring range and frequency response. Gyroscopes can be used for signals as small as earth's rotation and as large as tracking the motion of a human hand.

Combined Sensors

Murata SCC1300-D02 and SCC1300-D04 are combined high performance gyroscope and accelerometer components. The sensors are based on Murata's proven capacitive 3D-MEMS technology and integrate angular rate and acceleration sensing together with flexible separate digital SPI interfaces. The small robust packaging guarantees reliable operation over the products' lifetimes. The housing is suitable for SMD mounting, and the components are compatible with RoHS and ELV directives. These series are designed, manufactured, and tested for high stability, reliability, and quality requirements. The angular rate sensor bias stability is in the elite of MEMS gyros. It is also exceptionally insensitive to all mechanical vibrations and shocks. The components have several advanced self diagnostics features.

The newest combined sensor is the SCC2000 Series, a complete product platform for detecting acceleration and angular rate.  The new device combines a 3-axis accelerometer with an X-axis or the new Z-axis gyroscope. A gyroscope-only model is available.

  • Single axis X or Z-axis gyroscope with ±125°/s or ±300°/s measurement range
  • 3-axis accelerometer with ±2g or ±6g measurement range
  • Extensive self diagnostics features
  • Excellent bias stability, low noise level and good vibration robustness
  • SPI digital interface
  • User selectable low pass filter via SPI
  • −40°C…+125°C operating range
  • 3.0V…3.6V supply voltage
  • Size 15.0 x 8.5 x 4.35 mm (l x w x h)
  • Proven capacitive 3D-MEMS technology
  • Product platform qualified according to AEC-Q100 standard
  • Inertial Measurement Units (IMUs) for highly demanding environments
  • Platform stabilization and control
  • Machine control systems
  • Electronic Stability Control (ESC)
  • Hill Start Assist (HSA)
  • Roll over detection
  • Navigation systems
Gyro Performance Overview
Parameter X gyro Z gyro 
Offset temperature error ±0.8°/s ±0.8°/s 
Sensitivity error ±2.5% ±2.5% 
Linearity ±125°/s range
Integrated noise (RMS) 

 Accelerometer Performance Overview
Accel 2G
Accel 6G
Offset temperature error
±10 mg
±18 mg
Linearity ±1g range
±5 mg
±5 mg
Linearity ±FS range
±10  mg
±50 mg
Integrated noise (RMS)
1.2 mg
2.7 mg

Part NumberData SheetSensing AxisSensitivitySupply Voltage - MinDescriptionSupply CurrentOperating Supply Current
Loading First Previous Next Last

Murata Inclinometers

Murata inclination sensors are an optimum choice for high accuracy leveling and inclination measurement instruments. The highest accuracy is available with the SCA103T series which uses a differential measurement principle to compensate for all common mode error and noise effects. With the best shock durability available on the MEMS market, Murata inclinometers provide trouble-free measurements in moving machines, vehicles, airplanes, construction machines and handheld devices.

  • High performance
  • Robust design with high shock durability
  • Excellent stability over temperature and time
  • Excellent accuracy
  • Platform leveling and stabilization
  • 360º vertical orientation measurement
  • Leveling instruments
  • Construction levels

Part NumberData SheetSensitivityOutput Type

Loading First Previous Next Last

Murata Gyroscopes

Murata Electronics Oy develops and manufactures gyroscope components based on the company's proven 3D MEMS technology and highly integrated electronics. Industrial gyros offer a performance level that typically has been available only for expensive module products. The sensing elements and measuring circuitry are assembled into a pre-molded plastic dual-in-line (DIL) package, protected with silicon gel and covered with a stainless steel lid. All products are RoHS compatible and suitable for lead-free reflow soldering.

  • Fully digital with SPI interface
  • Superior angular rate bias stability over
    temperature and time
  • Vibration robustness
  • Excellent noise performance
  • -40ºC to +125ºC temperature range
  • Avionics, Automotive, Instruments
  • Platform stabilization
  • Motion analysis
  • Navigation systems

Part NumberData SheetSensing AxisSupply Voltage - MaxSupply Voltage - MinOutput TypeSupply CurrentResolutionOperating Supply Current
Loading First Previous Next Last

Murata MEMS Development Tools

MEMS Evaluation Unit
The Murata MEMS Evaluation Unit demonstrates the functionality and key properties of Murata MEMS Sensors. The Murata MEMS Evaluation Unit allows designers easily test the performance of Murata MEMS Accelerometers, Gyroscopes, and Inclinometers. The Murata Digital Accelerometer and Gyroscope Sensors are available as chip carrier Sensor Boards and Analog Sensors as extension boards with high accuracy A/D converter.
View MEMS Evaluation Board

  • Java based Graphical User Interface
  • Sensor output in graphical format
  • Data logging with time stamps
  • Data rate and average calculation configuration options
  • Powered from PC USB port or optionally from external 7-15VDC power supply

Available MEMs Daughter Boards

The MEMS Evaluation Board needs a product specific Sensor Board to function. The interface boards can be used with the MEMs Evaluation Board.

Part Number Description
X-axis Gyro + 3 axis Accelerometer Combo
Z-axis Gyro + 3 axis Accelerometer Combo
SCA100T-D01-PCB 2 axis Inclinometer ±30°
SCA100T-D02-PCB 2 axis Inclinometer ±90°
SCA100T-D07-PCB 2 axis Accelerometer ±12g
SCA103T-D04-PCB Diff. Inclinometer ±15
SCA103T-D05-PCB Diff. Inclinometer ±30°
SCA1000-N1000070-PCB 2 axis Accelerometer ±4g
1 axis Accelerometer ±2g
2 axis Accelerometer ±2g
SCC1300-D02-PWB 1 axis Gyro + 3 axis Accelerometer Combo
1 axis Gyro + 3 axis Accelerometer Combo

Murata Accelerometers

Murata accelerometers are based on the company's proprietary 3D MEMS technology and they offer a number of excellent product features and benefits for the most demanding applications. The measuring direction is parallel or perpendicular to the mounting plane. The ASIC includes an on-chip EEPROM memory with the calibration coefficients for unit interchangeability. Murata accelerometers include enhanced failure detection: digitally activated self-test, calibration memory parity or check sum check and continuous connection failure detection. The products are intended for horizontal or vertical measurements.The zero point temperature dependence is less than 1mg/°C.

  • Excellent accuracy
  • High stability
  • Extremely stable output over wide range of
    temperature, humidity, and vibrations
  • Outstanding overload and shock durability
  • Temperature Range -40ºC to +125ºC

  • Acceleration measurement
  • Inclination measurement
  • Motion measurement
  • Vibration measurement

Part NumberData SheetSensing AxisAccelerationSensitivitySupply Voltage - MaxSupply Voltage - MinOutput Type

Loading First Previous Next Last

  • Murata Electronics
  • Sensors