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Home » NEWEST Products » New by Manufacturer » Omron » Omron D6F Series MEMS Mass Flow Sensor
NEWEST Products

D6F MEMS Flow Sensors

The Omron family of D6F MEMS (MicroElectroMechanical System) Flow Sensors includes intelligent, compact models capable of measuring flow velocity and mass flow rate movement with highly repeatable accuracy. Mass flow rates from 1 LPM to 50 LPM (liters per minute) and high sensitivity are achieved with the MEMS Flow Chip.

Features
  • Small size due to MEMS technology
  • Flow Sensors can be used with most medical, inert welding, and combustion gases
  • Excellent repeatability and accuracy
Additional Resources
The D6F-P, D6F-V, and D6F-W Sensors incorporate a Dust Segregation System (DSS) allowing them to be used to monitor the performance of fans, detect clogged filters in computers and projectors, and VAV control in commercial HVAC systems.

Flow Sensors Butterfly Challenge

Gas Mass Flow Sensors

Features
  • High Accuracy Mass Flow Sensing with Omron's Propietary MEMS technology
  • Applications include: medical respiratory equipment, laboratory apparatus, combustion control, HVAC air volume control, fuel cells, gas testing equipment
  • Media: most non-corrosive gases, including Natural Gas, Oxygen, Air, Nitrogen, N2O, Heli-Ox, Helium, CO2, Argonne
  • Note, "Gas Media" shown on datasheets indicate what the standard parts are calibrated for. Calibrations are available in other gases. (Only Aluminum Alloy body type is suitable for natural gas.)

Type Additional Features Part Number
Gas Flow Range*
NEW!
Quick fastners for installation savings

Associated Product:
D6F-CABLE1
Cable Connector Assembly

  • Can measure micro-flow rate of city gas and LPG
  • width 84.6mm x length 30mm x height 30mm
  • RoHS Compliant
D6F-02L7-000 Natural Gas
0-2L/min
D6F-05N7-000 Natural Gas
0-5L/min

High Accuracy Mass Flow Sensing

  • Small size
  • Fast response
  • Applicable to air, non-corrosive gas
  • RoHS Compliant

  • Applications include: medical respiratory equipment, analysis apparatus, pick and place systems, spectroscopy, leak detection, environmental comfort controls and mass flow controllers.
D6F-01A1-110
Air 0-1L/min
D6F-02A1-110 Air 0-2L/min

High Accuracy Mass Flow Sensing for Natural Gas and Propane Applications

  • Small size
  • Fast response
  • Applicable to air, non-corrosive gas,
    natural gas and propane
  • Applications include: analysis
    apparatus, combustion control
  • RoHS Compliant
D6F-01N2-000 Natural Gas
0-1L/min
D6F-02L2-000 Propane Gas
0-2L/min
D6F-05N2-000 Natural Gas
0-5L/min

Compact sensors featuring MEMS technology for precision mass airflow measurement


Associated Product:
D6F-CABLE2
Cable Connector Assembly AWG28

  • Precision unidirectional mass airflow
    up to 3 LPM
  • Fast Response (< 5 msec, typical)
  • Ultra-compact size 36.6(L) x 8(W) x
    16.8(H) mm
  • Low power consumption
  • RoHS Compliant

  • Applications include: pick and place systems, industrial processes, leak detection, spectroscopy, mass flow controllers, scientific/test equipment, environmental comfort controls, fuel cell controls
D6F-03A3-000 Air 0-3L/min

Compact, intelligent sensor featuring MEMS technology for precision mass airflow measurement


Associated Product:
D6F-CABLE1
Cable Connector Assembly

  • Precision mass airflow up to 50 LPM
  • Stable output across full scale
  • Manifold mounting feature with NBR 'O' ring option
  • Compact size 78 (L) x 30 (W) x 30 (H) mm
  • Low power consumption
  • RoHS Compliant
  • Applications include: industrial processes, medical respirators and ventilators, MiG and TiG welding systems, anesthesia delivery, mass flow controllers, scientific/test equipment, fuel cell controls
D6F-20A5-000
Right-angle manifold mount connection
Air
0-20L/min
D6F-50A5-000
Right-angle manifold mount connection
Air 0-50L/min
D6F-10A6-000
Straight RC 1/4" BSPT threaded pipe
Air 0-10L/min
D6F-20A6-000
Straight RC 1/4" BSPT threaded pipe
Air 0-20L/min
D6F-50A6-000
Straight RC 1/4" BSPT threaded pipe
Air 0-50L/min

*Mass flow converted to volumetric flow (standard liters per minute) at 0ºC and 1 atm.


Mass Flow Sensors with DSS (Dust Segregation System)

Type Features Part Number
Gas* Airflow
Compact, high-performance flow sensor with Dust Segregation Structure


  • PCB terminals and connector models
  • New manifold mount version eliminates tube fittings
  • 0.1 - 1.0 LPM in-line, over 200 LPM possible when using a bypass set-up
  • Bi-directional Dust Segregation System keeps particulate away from the sensor element
  • Standard products are calibrated for unidirectional air flow
  • Alternative to differential pressure sensing
  • RoHS Compliance
D6F-P0001A1
PCB terminals,
flange mount

Air
0-0.1 LPM
D6F-P0010A2,
PCB terminals,
flange mount

Air 0-1 LPM
D6F-P0010A1**
Connector,
flange mount

Air 0-1 LPM
D6F-P0010AM2**
Connector,
manifold mount
Air
0-1 LPM

*Dry gas must not contain large particles, e.g. dust, oil, mist
**Associated Product: Cable Connector Assembly AWG28, D6F-CABLE2

D6F-P
DSS Simulation



D6F-P MEMS Flow Sensors Applications

Gas Velocity / Clogged Filter Sensors


Features
  • Excellent for clogged filter detection and fan performance monitoring
  • Take air velocity readings behind filters, in pipes or ductwork
  • Proprietary MEMS technology
  • Dust Segregation System keeps particulate away from sensor chip

Type Additional Features
Part Number
Gas* Flow Range
Compact, highly efficient flow sensor, unique dust separating structure



Associated Product:
D6F-W CABLE
Cable Connector Assembly
AWG26 (length 200mm)

  • Unique dust segregation structure.
  • +/-10% Full-Scale repeatable accuracy achieves consistent air velocity measurement, in a cost efficient package.
  • Applications include clogged-filter detection and air velocity.
  • RoHS Compliant

  • Applications: cassette, multi-modular air conditioners, duct connected heating/air systems, alternative for thermal dispersion measurement, air/water cooled chillers, indoor packaged AC systems, window/split, multi-split residential AC coolers, air purifiers, dehumidifiers, fan assisted space heaters, air cooled, high power indoor lighting, mission critical PC, workstation ventilation, watchdog ventilation systems
D6F-V03A1 Air 0-3 m/sec

MEMS precision technology for repeatable airflow velocity detection


Associated Product:
D6F-W CABLE
AWG26 (length 200mm)

  • Precision uni-directional air velocity detection with ±5% full-scale repeatable accuracy.
  • Integral passive Dust Segregation System (DSS) prevents contamination of sensor element.
  • Compact size: 39 (L) x 20 (W) x 9 (H) mm
  • Output signal amplified & temperature compensated.
  • User friendly - no adjustment necessary.
  • RoHS Compliant
D6F-W01A1 air 0-1 m/sec
D6F-W04A1 air
0-4 m/sec
D6F-W10A1 air 0-10 m/sec


*Dry gas must not contain large particles, e.g. dust, oil, mist
D6F-W DSS Simulation








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